Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems
An edition of Antireflecting-chromium linewidth standard, SRM 473, for calibration of optical microscope linewidth measuring systems (1992)
standard reference materials
By Carol F. Vezzetti
Publish Date
1992
Publisher
U.S. Dept. of Commerce, Technology Administration, National Institute of Standards and Technology,Order from National Technical Information Service
Language
eng
Pages
36
Description:
subjects: Calibration, Chromium, Integrated circuits, Masks, Measurement, Microscopes, Spectra, Standards