Microelectronic devices based on ultra-shallow junctions and silicon-on-insulator materials

An edition of Microelectronic devices based on ultra-shallow junctions and silicon-on-insulator materials (1991)

Microelectronic devices based on ultra-shallow junctions and silicon-on-insulator materials

By Anders Soderbarg

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Publish Date

1991

Publisher

Uppsala University,Distributor, Almqvist & Wiksell International

Language

eng

Pages

Description:

subjects: Metal semiconductor field-effect transistors, Silicon-on-insulator technology, Semiconductors, Junctions, Microelectronics