An edition of Materials modification by energetic atoms and ions (1992)

Materials modification by energetic atoms and ions

Symposium held April 28-30, 1992, San Francisco, California, USA

By Materials Research Society. Meeting Symposium.,Kenneth S. Grabowski,Scott A. Barnett

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

Publish Date

1992

Publisher

Materials Research Society

Language

eng

Pages

405

Description:

subjects: Congresses, Etching, Ion bombardment, Plasma etching, Semiconductors, Thin films, Science/Mathematics, Electronic Circuits, Materials, research