An edition of Materials modification by energetic atoms and ions (1992)

Materials Modification by Energetic Atoms and Ions

Symposium Held April 28-30, 1992, San Francisco, California, USA (Materials Research Society Symposium Proceedings)

By Materials Research Society. Meeting Symposium.,Kenneth S. Grabowski,Scott A. Barnett

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Publish Date

August 1992

Publisher

Materials Research Society

Language

eng

Pages

405

Description:

subjects: Congresses, Etching, Ion bombardment, Plasma etching, Semiconductors, Thin films, Science/Mathematics, Electronic Circuits, Materials, research