Comptes rendus des travaux du CIP G87

An edition of Comptes rendus des travaux du CIP G87 (1987)

Comptes rendus des travaux du CIP G87

By International Colloquium on Plasmas and Sputtering (6th 1987 Antibes, France)

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

0 Want to read0 Currently reading0 Have read

Publish Date

1987

Publisher

Société française du vide

Language

eng

Pages

280

Description:

subjects: Cathode sputtering (Plating process), Congresses, Microelectronics, Plasma etching, Thin films