An edition of Ion tracks and microtechnology (1990)

Ion Tracks and Microtechnology

Principles and Applications

By Reimar Spohr

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Publish Date

2012

Publisher

Springer Vieweg. in Springer Fachmedien Wiesbaden GmbH

Language

eng

Pages

272

Description:

subjects: Effect of radiation on, Industrial applications, Ion beam lithography, Ion bombardment, Materials, Ionenspur, Mikrosystemtechnik, Ion, Spur