Cover of Dry etching for VLSI

An edition of Dry etching for VLSI (1991)

Dry etching for VLSI

By A. J. van Roosmalen

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Publish Date

1991

Publisher

Plenum Press

Language

eng

Pages

237

Description:

subjects: Design and construction, Etching, Integrated circuits, Plasma etching, Semiconductors, Very large scale integration, Integrated circuits, very large scale integration