An edition of Foundations of MEMS (2005)
Foundations of MEMS
By Liu, Chang Ph.D.
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Publish Date
2005
Publisher
Pearson Prentice Hall,Prentice Hall,Pearson/Prentice Hall
Language
eng
Pages
530
Description:
subjects: Microelectromechanical systems, Microelectronics, Micromechanics, MEMS