An edition of Chemical mechanical planarization IV (2001)

Chemical mechanical planarization IV

proceedings of the International Symposium

By International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing (4th 2000 Phoenix, Ariz.)

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

Publish Date

2001

Publisher

Electrochemical Society, Inc.

Language

eng

Pages

338

Description:

subjects: Congresses, Grinding and polishing, Integrated circuits, Materials, Metals, Microelectronics, Pickling, Chemical mechanical planarization