Explore Books on
chemical mechanical planarization

Nanoparticle engineering for chemical-mechanical planarization

By Ungyu Paik

Tribology in chemical-mechanical planarization

By Hong Liang,Hong Liang,David Craven

Microelectronic Applications of Chemical Mechanical Planarization

By Yuzhuo Li

Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses

By Christopher L. Borst,Christopher Lyle Borst,William N. Gill,Ronald J. Gutmann

Chemical mechanical planarization of microelectronic materials

By Joseph M. Steigerwald

Chemical-Mechanical Polishing 2001--Advances and Future Challenges

By Jane K. Corbin

Advances in Chemical Mechanical Planarization (CMP)

By Suryadevara Babu

Chemical-Mechanical Planarization

By Michael R. Oliver,Duane S. Boning,Ingrid Vos

Chemical-mechanical polishing, fundamentals and challenges

By S. V. Babu,S. Danyluk

Handōtai CMP yōgo jiten

By

Chemical mechanical planarization V

By International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing (5th 2002 Philadelphia, Pa.)

Advances in Chemical-Mechanical Polishing

By Materials Research Society

Chemical Mechanical Planarization in Ic Device Manufacturing (Proceedings / Electrochemical Society)

By R. L. Opila

Chemical Mechanical Polishing Equipment and Materials

By Business Communications Co.

Chemical-Mechanical Polishing 2000-Fundamentals and Materials Issues

By Calif.) Chemical-Mechanical Polishing 200 (2000 San Francisco

Chemical Mechanical Planarization of Semiconductor Materials

By M.R. Oliver

Chemical-Mechanical Planarization--Integration, Technology and Reliability

By Ashok Kumar

Chemical Mechanical Planarization in IC Device Manufaturing III

By I. Ali, Y. A. Arimoto, Y. Homma, C. Reidsema-Simpson, K. B. Sundaram R. L. Opila

Nanoparticle engineering for chemical-mechanical planarization

By Ungyu Paik

Advanced interconnects and chemical mechanical planarization for micro- and nanoelectronics

By Symposium E, "Chemical Mechanical Planarization as a Semiconductor Technology Enabler," (2010 San Francisco, Calif.)

Chemical mechanical planarization VI

By International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing (6th 2003 Orlando, Fla.)

Chemical mechanical planarization IV

By International Symposium on Chemical Mechanical Planarization in Integrated Circuit Device Manufacturing (4th 2000 Phoenix, Ariz.)

Microelectronic applications of chemical mechanical planarization

By

Advances and challenges in chemical mechanical planarization

By Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" (2007 San Francisco, Calif.)