An edition of Scanning probe lithography (2001)
Scanning Probe Lithography (Microsystems, Volume 7) (Microsystems)
By Hyongsok T. Soh,Kathryn Wilder Guarini,Calvin F. Quate
Publish Date
June 30, 2001
Publisher
Springer
Language
eng
Pages
195
Description:
subjects: Design and construction, Integrated circuits, Microlithography, Scanning probe microscopy, Semi-conductors & super-conductors, Engineering - Electrical & Electronic, Technology, Microelectronics, Technology & Industrial Arts, Science/Mathematics, Electronics - Circuits - Printed, Material Science, Technology / Electronics / Circuits / General, Technology / Electronics / Circuits / Printed, Technology : Engineering - Electrical & Electronic, Technology : Material Science, Electronics - Circuits - Integrated, Electronics - Microelectronics, Microscopy