An edition of Advanced Metallization for ULSI Applications (1992)
Advanced metallization for ULSI applications
proceedings of the conference held October 8-10, 1991, at AT&T Bell Laboratories, Murray Hill, New Jersey, U.S.A., and October 28-30, 1991, Tokyo, Japan
By Virendra Vir Singh Rana
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Publish Date
1992
Publisher
Materials Research Society.
Language
eng
Pages
580
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