An edition of Plasma-aided nanofabrication (2007)
Plasma-Aided Nanofabrication
From Plasma Sources to Nanoassembly
By K. Ostrikov,Ken Ostrikov,Shuyan Xu
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Publish Date
September 17, 2007
Publisher
Wiley-VCH
Language
eng
Pages
315
Description:
subjects: Nanostructured materials, Low temperature plasmas, Manufacturing processes, Plasma engineering, Nanotechnology, Plasma physics, Technology, Technology & Industrial Arts, Science/Mathematics, Electronics - Microelectronics, Technology / Electronics / Microelectronics, Plasma (ionized gases), Textile chemistry