An edition of Modeling MEMS and NEMS (2002)
Modeling Mems and Nems
By John A. Pelesko,David H. Bernstein
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Publish Date
2002
Publisher
CRC Press LLC
Language
eng
Pages
384
Description:
subjects: Mathematical models, Microelectromechanical systems, Electronics engineering, Mathematical modelling, Technical design, Technology, Mechanical Engineering (Specific Aspects), Microelectronics, Technology & Industrial Arts, Science/Mathematics, Applied, Engineering - Electrical & Electronic, Engineering - Mechanical, Technology / Electronics / Microelectronics, Electronics - General, Electronics - Microelectronics, Electromechanical devices