An edition of Microelectronic Applications of Chemical Mechanical Planarization (2007)

Microelectronic Applications of Chemical Mechanical Planarization

By Yuzhuo Li

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Publish Date

2007

Publisher

Wiley & Sons, Incorporated, John

Language

eng

Pages

747

Description:

subjects: Materials, Chemical mechanical planarization, Microelectronics, Integrated circuits, Design and construction, Grinding and polishing