1-3 of 3 Books

Nanoparticle engineering for chemical-mechanical planarization
By Ungyu Paik

Tribology in chemical-mechanical planarization
By Hong Liang,Hong Liang,David Craven
Advances in Chemical Mechanical Planarization (CMP)
Advances in Chemical Mechanical Planarization (CMP)
By Suryadevara Babu