An edition of Tribology in chemical-mechanical planarization (2005)
Tribology In Chemical-Mechanical Planarization
By Hong Liang,Hong Liang,David Craven
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Publish Date
March 1, 2005
Publisher
CRC
Language
eng
Pages
199
Description:
subjects: Tribology, Grinding and polishing, Technology: General Issues, Power Tools, Science, Home Improvement / Construction, Science/Mathematics, Engineering - General, Material Science, Technology / Material Science, Chemistry - General, Chemical mechanical planarization, Tribologie (Technologie), Planarisation chimicomécanique, HOUSE & HOME