An edition of Introduction to microlithography (1994)
Introduction to Microlithography (Acs Professional Reference Book)
By Larry F. Thompson,Murrae J. Bowden,C. Grant Willson
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Publish Date
February 10, 1998
Publisher
An American Chemical Society Publication
Language
eng
Pages
534
Description:
subjects: Congresses, Etching, Plasma etching, Photoresists, Semiconductors, Microlithography