An edition of Advanced metallization and interconnect systems for ULSI applications in 1995 (1996)

Advanced metallization and interconnect systems for ULSI applications in 1995

proceedings of the conference held October 3-5, 1995 in Portland, Oregon, sponsored by Continuing Education in Engineering, University Extension, University of California at Berkeley, U.S.A., a parallel session of the conference was held from October 24- 25, 1995 in Tokyo, Japan

By Shi-Qing Wang