An edition of ULSI semiconductor technology atlas (2003)
By Chih-Hang Tung,George T. T. Sheng,Chih-Yuan Lu
Publish Date
October 6, 2003
Publisher
Wiley-Interscience
Language
eng
Pages
666
Description:
subjects: Electron microscopy, Atlases, Integrated circuits, Ultra large scale integration, Integrated circuits, ultra large scale integration, Electron microscopes