IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems
An edition of IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems (1998)
proceedings : an investigation of micro structures, sensors, actuators, machines and systems, January 25-29, 1998, Heidelberg, Germany
By IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany),Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg,Institute of Electrical and Electronics Engineers
Publish Date
1998
Publisher
Institute of Electrical and Electronics Engineers,IEEE Service Center
Language
eng
Pages
666
Description:
subjects: Congresses, Actuators, Detectors, Electromechanical devices, Microelectronics, Communications engineering / telecommunications, Electronic devices & materials, Science/Mathematics, Electronic Apparatus And Devices, Technology, Technology & Industrial Arts, Industrial Design - General, Reference, Electronics - Microelectronics, Engineering - Electrical & Electronic, Microelectromechanical systems, Microactuators