IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems
An edition of IEEE, the Eleventh Annual International Workshop on Micro Electro Mechanical Systems (1998)
An investigation of micro structures, sensors, actuators, machines and ... January 25-29, 1998, Heidelberg, Germany
By IEEE Workshop on Micro Electro Mechanical Systems (11th 1998 Heidelberg, Germany),Germany) IEEE Workshop on Micro Electro Mechanical Systems (11th : 1998 : Heidelberg,Institute of Electrical and Electronics Engineers
Publish Date
1998
Publisher
Institute of Electrical and Electronics Engineers
Language
eng
Pages
666
Description:
subjects: Congresses, Actuators, Detectors, Electromechanical devices, Microelectronics, Communications engineering / telecommunications, Electronic devices & materials, Science/Mathematics, Electronic Apparatus And Devices, Technology, Technology & Industrial Arts, Industrial Design - General, Reference, Electronics - Microelectronics, Engineering - Electrical & Electronic, Microelectromechanical systems, Microactuators