Semiconductor measurement technology

evolution of silicon materials characterization : lessons learned for improved manufacturing

By W. Murray Bullis

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Publish Date

1993

Publisher

U.S. Dept. of Commerce, National Institute of Standards and Technology,For sale by the Supt. of Docs., U.S. G.P.O.

Language

eng

Pages

211

Description:

subjects: Semiconductors, Wafer-scale integration, Semiconductor wafers, Integrated circuits

Places: United States