An edition of Materials, technology and reliability for advanced interconnects and low-k dielectrics, 2003 (2003)
Materials, Technology and Reliability for Advanced Interconnects and Low-K Dielectrics--2003
Volume 766
By Symposim E, "Materials, Technology, and Reliability for Advanced Interconnects and Low-k Dielectrics" (2003 San Francisco, Calif.)
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Publish Date
January 2003
Publisher
Materials Research Society
Language
eng
Pages
515
Description:
subjects: Congresses, Dielectric films, Integrated circuits, Junctions, Materials, Reliability, Semiconductors