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Cover of Gate Stack and Silicide Issues in Silicon Processing II Symposium Held April 17-19, 2001, San Francisco, California, U.S.A

Gate Stack and Silicide Issues in Silicon Processing II Symposium Held April 17-19, 2001, San Francisco, California, U.S.A

Symposium Held April 17-19, ... Research Society Symposia Proceedings.)

By S. A. Campbell

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Publish Date

April 2002

Publisher

Materials Research Society

Language

eng

Pages

288

Description:

subjects: Silicides,  Silicon,  Integrated circuits,  Congresses,  Ultra large scale integration,  Materials,  Gate array circuits,  Electric leakage