Explore Books on
electron beam lithography

Nanofabrication

By Ampere A. Tseng

Electron-Beam, X Ray, and Ion-Beam Technology; Submicrometer Lithographics VII (Proceedings of SPIE--the International Society for Optical Engineering)

By Arnold W. Yanof

Electron-Beam, X-Ray, and Ion-Beam Technology

By Douglas J. Resnick

Emerging lithographic technologies XI

By

Nanofabrication

By

Raschet i proektirovanie ustroĭstv ėlektronnoĭ i ionnoĭ litografii

By V. K. Popov

Emerging Lithographic Techniques VI

By Roxann L. Engelstad

Emerging Lithographic Technologies 9

By R. Scott Mackay

Dry processing for submicrometer lithography

By

Lithography Asia 2008

By Alek C. Chen,Burn Lin,Anthony Yen

Electron-beam lithography contributions from Jena

By Peter Hahmann

Emerging lithographic technologies V

By Elizabeth A. Dobisz

Electron-beam, X-ray, and ion-beam submicrometer lithographies for manufacturing IV

By

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies IV

By

Alternative lithographic technologies IV

By William Man-Wai Tong,Douglas J. Resnick

Design technology co-optimization in the era of sub-resolution IC scaling

By Lars W. Liebmann

Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York

By International Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.)

Microcircuit Engineering 80

By International Conference on Microlithography (1980 Amsterdam, The Netherlands)

Proceedings of the 1983 International Symposium on Electron, Ion, and Photon Beams

By International Symposium on Electron, Ion, and Photon Beams (1st 1983 Los Angeles, Calif.)

Alternative lithographic technologies II

By Daniel J. C. Herr

Dian zi shu bao guang wei na jia gong ji shu

By Wenqi Gu

The physics of submicron lithography

By Kamilʹ Akhmetovich Valiev

Emerging lithographic technologies VIII

By R. Scott Mackay

Electron-beam, X-ray, and ion-beam techniques for submicrometer lithographies III

By