Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York

An edition of Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York (1985)

Proceedings of the 1984 International Symposium on Electron, Ion, and Photon Beams, 29 May-1 June, 1984, Westchester Marriott Hotel, Tarrytown, New York

By International Symposium on Electron, Ion, and Photon Beams (2nd 1984 Tarrytown, N.Y.)

0 (0 Ratings)

0 Want to read0 Currently reading0 Have read

Publish Date

1985

Publisher

Published for the American Vacuum Society by the American Institute of Physics

Language

eng

Pages

463

Description:

subjects: Congresses, Electron beam Lithography, Etching, Ion beam lithography, Lithography, Electron beam, Photolithography, Semiconductors