An edition of Low Pressure Plasmas and Microstructuring Technology (2009)
Low Pressure Plasmas and Microstructuring Technology
By Gerhard Franz
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Publish Date
2009
Publisher
Springer-Verlag Berlin Heidelberg
Language
eng
Pages
756
Description:
subjects: Surfaces (Physics), Molecular structure, Materials, Electronics, Optical materials, Plasma (ionized gases), Engineering, Plasma etching, Plasma (Ionized gases), Industrial applications, Plasma engineering, Ionenstrahlbearbeitung, Niederdruckplasma, Hochfrequenzentladung, PECVD-Verfahren, Sputtern, Plasmaätzen