An edition of EUV, X-ray, and neutron optics and sources (1999)

EUV, X-ray, and neutron optics and sources

21-23 July 1999, Denver, Colorado

By Carolyn MacDonald,Kenneth Goldberg,Juan Maldonado

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Publish Date

1999

Publisher

SPIE

Language

eng

Pages

394

Description:

subjects: Neutron sources, Electron beam Lithography, Congresses, Ion beam lithography, X-ray optics, Extreme ultraviolet lithography, X-rays, industrial applications, Lithography, electron beam, Grenz rays