Proceedings of the symposia on Patterning Science and Technology II [and] Interconnection and Contact Metallization for ULSI

An edition of Proceedings of the symposia on Patterning Science and Technology II [and] Interconnection and Contact Metallization for ULSI (1992)

Patterning Science and Technology II and Interconnection and Contact Metallization for Ulsi (Proceedings / Electrochemical Society)

By International Symposium on Patterning Science and Technology (2nd 1991 Phoenix, Ariz.)

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Publish Date

March 1992

Publisher

Electrochemical Society

Language

eng

Pages

382

Description:

subjects: Congresses, Design and construction, Integrated circuits, Lithography, Metallizing, Microelectronic packaging, Ultra large scale integration, Microelectronics, Microlithography, Photoresists, Masks (Electronics), Large scale integration